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                                       Details for article 92 of 187 found articles
 
 
  Impact of dummy metal filling strategy dedicated to inductors integrated in advanced thick copper RF BEOL
 
 
Title: Impact of dummy metal filling strategy dedicated to inductors integrated in advanced thick copper RF BEOL
Author: Pastore, C.
Gianesello, F.
Gloria, D.
Serret, E.
Benech, Ph.
Appeared in: Microelectronic engineering
Paging: Volume 85 (2008) nr. 10 pages 5 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 92 of 187 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands