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Journal description
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Details for article 68 of 187 found articles
| Title: |
Experiment-based estimation of point spread function in electron-beam lithography: Forward-scattering part |
| Author: |
Dai, Q. Lee, S.-Y. Lee, S.-H. Kim, B.-G. Cho, H.-K. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 88 (2011) nr. 10 pages 8 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 68 of 187 found articles
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