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Journal description
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Details for article 28 of 187 found articles
| Title: |
Chemical bonds in damaged and pristine low-κ materials: A comparative EELS study |
| Author: |
Stegmann, Heiko Özdöl, V. Burak Koch, Christoph van Aken, Peter A. Engelmann, Hans-Jürgen Potapov, Pavel Zschech, Ehrenfried |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 10 pages 3 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 28 of 187 found articles
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