|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 13 of 187 found articles
| Title: |
Application of VUV irradiation to promote the wet etch resistance of PSZ-SOG film inside the gap |
| Author: |
Chen, Chia-Ming Yeh, Ming-Hsin Chien, Hung-Ju Fan, Jhen-Jhih Yan, Chin-Rung Matsuo, Hiroshi |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 87 (2010) nr. 10 pages 5 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 187 found articles
| << previous | next >> |