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Nanotwin formation and its physical properties and effect on reliability of copper interconnects |
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Titel: |
Nanotwin formation and its physical properties and effect on reliability of copper interconnects |
Auteur: |
Xu, Di Sriram, Vinay Ozolins, Vidvuds Yang, Jenn-Ming Tu, K.N. Stafford, Gery R. Beauchamp, Carlos Zienert, Inka Geisler, Holm Hofmann, Petra Zschech, Ehrenfried |
Verschenen in: |
Microelectronic engineering |
Paginering: |
Jaargang 85 (2008) nr. 10 pagina's 4 p. |
Jaar: |
2008 |
Inhoud: |
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Uitgever: |
Published by Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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