|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 7 of 36 found articles
| Title: |
Characteristic features of an apparatus for plasma immersion ion implantation and physical vapour deposition |
| Author: |
Ensinger, W. Klein, J. Usedom, P. Rauschenbach, B. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 93 (1997) nr. 2-3 pages 6 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. All rights reserved. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 36 found articles
| << previous | next >> |