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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 31 of 36 found articles
| Title: |
Shallow junction formation by plasma immersion ion implantation |
| Author: |
Shao, Jiqun Jones, Erin C. Cheung, Nathan W. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 93 (1997) nr. 2-3 pages 4 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. All rights reserved. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 36 found articles
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