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X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias |
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Title: |
X-ray reflectivity studies on DLC films deposited by microwave ECR CVD: Effect of substrate bias |
Author: |
Singh, S.B. Poswal, A.K. Pandey, M. Tokas, R.B. Chand, N. Dhara, S. Sundaravel, B. Nair, K.G.M. Sahoo, N.K. Patil, D.S. |
Appeared in: |
Surface & coatings technology |
Paging: |
Volume 203 (2009) nr. 8 pages 6 p. |
Year: |
2009 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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