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Journal description
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Details for article 21 of 24 found articles
| Title: |
Reactive partially ionized beam deposition of AlN thin films |
| Author: |
Feng, Jiayou Xie, Junqing Mo, Qingwei |
| Appeared in: |
Materials letters |
| Paging: | Volume 33 (1997) nr. 3-4 pages 4 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 21 of 24 found articles
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