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Journal description
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Details for article 7 of 13 found articles
| Title: |
Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation |
| Author: |
Jindal, Sumit Kumar Varma, M. Aditya Thukral, Deepali |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 73 () nr. C pages 30-36 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 13 found articles
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