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Journal description
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Details for article 22 of 38 found articles
| Title: |
Investigation of Si/SiGe/Si heterostructure implanted by H ion and annealed in vacuum and dry O2 ambient |
| Author: |
Chen, Changchun Liu, Jiangfeng Yu, Benhai Dai, Qirun |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 38 (2007) nr. 6-7 pages 5 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 22 of 38 found articles
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