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Journal description
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Details for article 112 of 120 found articles
| Title: |
The local structural characterization of the inactive clusters in B, BF2 and BF3 implanted Si wafers using X-ray techniques |
| Author: |
Sahiner, M. Alper Downey, Daniel F. Novak, Steven W. Woicik, Joseph C. Arena, Dario A. |
| Appeared in: |
Microelectronics journal |
| Paging: | Volume 36 (2005) nr. 3-6 pages 5 p. |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 112 of 120 found articles
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