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  Crystallization of ITO and TiO2 by RF plasma treatment
 
 
Title: Crystallization of ITO and TiO2 by RF plasma treatment
Author: Ohsaki, Hisashi
Andou, Ryou
Kinbara, Akira
Watanabe, Toshiya
Appeared in: Vacuum
Paging: Volume 87 (2013) nr. C pages 5 p.
Year: 2013
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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