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                                       Details for article 10 of 20 found articles
 
 
  Energy deposition and substrate heating during magnetron sputtering
 
 
Title: Energy deposition and substrate heating during magnetron sputtering
Author: Andritschky, M
GuimarĂ£es, F
Teixeira, V
Appeared in: Vacuum
Paging: Volume 44 (1993) nr. 8 pages 5 p.
Year: 1993
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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