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Journal description
All volumes of the corresponding journal
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All articles of the corresponding issues
Details for article 41 of 115 found articles
| Title: |
Emission spectroscopy of glow-discharge and sputtering plasmas used in amorphous Si:H film deposition |
| Author: | |
| Appeared in: |
Vacuum |
| Paging: | Volume 31 (1981) nr. 4-5 pages 1 p. |
| Year: |
1981 |
| Contents: | |
| Publisher: |
Pergamon Press Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 41 of 115 found articles
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