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Journal description
All volumes of the corresponding journal
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Details for article 4 of 79 found articles
| Title: |
Characteristics of a rotational windmill-shaped radio frequency magnetron sputtering plasma for effective target utilization |
| Author: |
Ohtsu, Yasunori Nakashima, Takahiro Tanaka, Rei Schulze, Julian |
| Appeared in: |
Vacuum |
| Paging: | Volume 181 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 79 found articles
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