|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 27 of 79 found articles
| Title: |
Fabrication and simulation of neutral-beam-etched silicon nanopillars |
| Author: |
Chuang, Min-Hui Ohori, Daisuke Li, Yiming Chou, Kuan-Ru Samukawa, Seiji |
| Appeared in: |
Vacuum |
| Paging: | Volume 181 () nr. C pages p. |
| Year: |
2020 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 27 of 79 found articles
| << previous | next >> |