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                                       Details for article 141 of 145 found articles
 
 
  Two-dimensional dopant profiling in semiconductor devices by electron holography and chemical etching delineation techniques with the same specimen
 
 
Title: Two-dimensional dopant profiling in semiconductor devices by electron holography and chemical etching delineation techniques with the same specimen
Author: Shaislamov, Ulugbek
Yang, Jun-Mo
Yoo, Jung Ho
Seo, Hyun-Sang
Park, Kyung-Jin
Choi, Chel-Jong
Hong, Tae-Eun
Yang, Beelyong
Appeared in: Microelectronics reliability
Paging: Volume 48 (2008) nr. 10 pages 3 p.
Year: 2008
Contents:
Publisher: Elsevier Ltd
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 141 of 145 found articles
 
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