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Journal description
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Details for article 141 of 145 found articles
| Title: |
Two-dimensional dopant profiling in semiconductor devices by electron holography and chemical etching delineation techniques with the same specimen |
| Author: |
Shaislamov, Ulugbek Yang, Jun-Mo Yoo, Jung Ho Seo, Hyun-Sang Park, Kyung-Jin Choi, Chel-Jong Hong, Tae-Eun Yang, Beelyong |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 48 (2008) nr. 10 pages 3 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 141 of 145 found articles
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