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Application of Fast Laser Deprocessing Techniques on large cross-sectional view area sample with FIB-SEM dual beam system |
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Titel: |
Application of Fast Laser Deprocessing Techniques on large cross-sectional view area sample with FIB-SEM dual beam system |
Auteur: |
Zhao, Y.Z. Wang, Q.J. Tan, P.K. Yap, H.H. Liu, B.H. Feng, H. Tan, H. He, R. Huang, Y.M. Wang, D.D. Zhu, L. Chen, C.Q. Rivai, F. Lam, J. Mai, Z.H. |
Verschenen in: |
Microelectronics reliability |
Paginering: |
Jaargang 64 (2016) nr. C pagina's 5 p. |
Jaar: |
2016 |
Inhoud: |
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Uitgever: |
Elsevier Ltd |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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