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Characterization of interface state density of three-dimensional Si nanostructure by charge pumping measurement |
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Title: |
Characterization of interface state density of three-dimensional Si nanostructure by charge pumping measurement |
Author: |
Dou, Chunmeng Shoji, Tomoya Nakajima, Kazuhiro Kakushima, Kuniyuki Ahmet, Parhat Kataoka, Yoshinori Nishiyama, Akira Sugii, Nobuyuki Wakabayashi, Hitoshi Tsutsui, Kazuo Natori, Kenji Iwai, Hiroshi |
Appeared in: |
Microelectronics reliability |
Paging: |
Volume 54 (2014) nr. 4 pages 5 p. |
Year: |
2014 |
Contents: |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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