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                                       Details for article 106 of 183 found articles
 
 
  Modelling of epitaxial growth rate of silicon by vapour phase epitaxy
 
 
Title: Modelling of epitaxial growth rate of silicon by vapour phase epitaxy
Author:
Appeared in: Microelectronics reliability
Paging: Volume 32 (1992) nr. 1-2 pages 1 p.
Year: 1992
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 106 of 183 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands