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                                       Details for article 29 of 162 found articles
 
 
  Computer simulated and channelling studies of damage distributions in phosphorus implanted silicon
 
 
Title: Computer simulated and channelling studies of damage distributions in phosphorus implanted silicon
Author:
Appeared in: Microelectronics reliability
Paging: Volume 30 (1990) nr. 1 pages 1 p.
Year: 1990
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 29 of 162 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands