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Details for article 26 of 87 found articles
| Title: |
Does short wavelength lithography process degrade the integrity of thin gate oxide? |
| Author: |
Kim, S.J. Cho, B.J. Chong, P.F. Chor, E.F. Ang, C.H. Ling, C.H. Joo, M.S. Yeo, I.S. |
| Appeared in: |
Microelectronics reliability |
| Paging: | Volume 40 (2000) nr. 8-10 pages 5 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 87 found articles
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