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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 31 of 31 found articles
| Title: |
Two-step annealing effects on ultrathin EOT higher-k (k =40) ALD-HfO2 gate stacks |
| Author: |
Morita, Yukinori Migita, Shinji Mizubayashi, Wataru Masahara, Meishoku Ota, Hiroyuki |
| Appeared in: |
Solid-state electronics |
| Paging: | Volume 84 (2013) nr. C pages 7 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier Ltd |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 31 found articles
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