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                                       Details for article 731 of 9875 found articles
 
 
  Anisotropic etching of silicon at high pressure
 
 
Title: Anisotropic etching of silicon at high pressure
Author: Abbott, A.P.
Campbell, S.A.
Satherley, J.
Schiffrin, D.J.
Appeared in: Journal of electroanalytical chemistry
Paging: Volume 348 (1993) nr. 1-2 pages 7 p.
Year: 1993
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 731 of 9875 found articles
 
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